Line/Space Analysis

Summary:
The Line/Space Analysis application is an automated, standard, non-proprietary image measurement tool for top-down CD-SEM images from any and all available CD-SEM and AFM equipment platforms, for repeatable, accurate results on line/space patterns. It reports average linewidth as well as the widths of individual lines. Also supports AFM images for line/space patterns. SIMAGIS Semi automatically recognizes lines and spaces as well as horizontal/vertical orientation without manual intervention. SIMAGIS filters noise, detects edges, and performs a comprehensive statistical analysis of CD measurements and Line Roughness (LER/LWR). Statistical results include individual results, aggregate/cumulative results and histograms.

Supported Image Types:
Top-down CD SEM images and AFM images.

Sample Preparation:
Sample preparation and imaging services, if needed, are available through our qualified Service Partners.

Sample Analysis Report:

Analysis Metrics/Outputs:

	Line Width
	LWR <3σ>
	LER Left <3σ>
	LER Right <3σ>
	Space Width
	Pitch Left
	Pitch Right
	Duty Cycle Left
	Duty Cycle Right
	Slope Angle Left
	Slope Angle Right
	Sigma inf <3σ>