CD-SEM Linewidth and Roughness Analyzer

Solution Summary:
Solution provides fully automated statistically accurate  CD measurements and Roughness analysis. The analysis process includes automated recognition of line patterns from CD-SEM image; vertical orientation; determination of lines and spaces; noise filtration; edge detection; comprehensive statistical analysis of CD measurements and Line Roughness (LER/LWR) at selected level . Statistical results include individual and cumulative analysis as well as distribution graphs.

Source Image:
Top-down SEM images or AFM surface image.

Sample Preparation:
Sample preparation and imaging services are available through our Service Partners.

Sample Report:

Determined Parameters:

	Line Width
	LWR <3σ>
	Correlation Length ξ
	Roughness Exponent α
	Sigma inf <3σ>
	Line Space
	Pitch Left
	Pitch Right
	Slope Angle Left
	Slope Angle Right
	LER Left <3σ>
	LER Right <3σ>